습식 공정 시스템
자동차 애플리케이션, 의료 기기, 5G 및 클라우드 스토리지로 향하는 첨단 microelectronics의 신뢰성을 보장하려면 지속 가능한 방법을 사용한 표면 준비가 중요합니다.
Wet Processing Application Suite:
WaferStorm Platform
- Metal Lift-Off
- Photoresist/Dry Film Strip
- Flux Clean
- Scrubber
- TSV Clean
WaferEtch Platform
- UBM/RDL Etch
- Compound Semiconductor Etch and Silicon Thinning
Making a Material Difference with Wet Process Technology:
- High uniformity combined with low defectivity
- Flexible design to meet a wide range of process requirements
- Proprietary immJET technology combines batch immersion and single wafer spray processing
The WaferStorm platform is the industry choice for a number of critical solvent-based processes in the advanced packaging, MEMs,…
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The WaferEtch platform is the industry choice for a number of critical aqueous-based processes in the advanced packaging, MEMs,…
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