GEN2000 Edge Production MBE System

Wafers 3x8", 7x6", 14x4", 23x3"

The GEN2000® provides superior throughput, longer campaigns, smaller footprint and cluster tool wafer handling. It is the ideal choice for high-volume manufacturing of wireless telecommunications devices such as HBTs and pHEMTs, and emerging applications requiring multi-6" production with low cost of ownership.

• Delivers industry's lowest cost per wafer
• Superior design enables 40%-60% smaller footprint than comparable MBE tools
• Modular architecture allows for up to two growth modules, increasing throughput or allowing processing of incompatible materials
• Easy maintenance maximizes uptime
• Optional bulkhead installation optimizes cleanroom space
• Incorporates the industry's most innovative, reliable system hardware, sources and components