Linear Anode Layer Ion Source

Linear source provides high power beams for thin film processes

High power gridless anode layer ion source provides Veeco’s broadest operating range for a wide variety of thin film fabrication operations requiring high current density operation from high vacuum up to milliTorr pressure ranges.

• Designed for high volume, low maintenance operation
• Independent beam energy and current control makes anode layer sources excellent resource for long, uninterrupted production runs
• Supports beam energies between 100 and 1800eV
• Also supports beam currents up to 30mA/linear cm
• Provides both gridless and filamentless operation with all inert and reactive gases